发明名称 IMAGE SENSOR WITH EMBEDDED PHOTODIODE REGION AND MANUFACTURING METHOD FOR SAME
摘要 A CMOS image sensor with an effectively increased aperture ratio and moreover with improved optical sensitivity, and a method of manufacture of such a CMOS image sensor is provided a first aspect of the invention is an image sensor, has a pixel region 10 in which are formed a plurality of pixels each having at least a photodiode, a reset transistor, and a source-follower transistor; and a peripheral circuit region 12 in which are formed peripheral circuits which process read-out signals read out from the pixel region, a well region PW 2 in the pixel region PW 1 is formed to be more shallow than a well region in the peripheral circuit region. Also, reset transistors or source-follower transistors are formed in the shallow well region PW 2 of the pixel region 10 , and a photodiode region PHD 2 is embedded below the transistor well region PW 2.
申请公布号 US2008001192(A1) 申请公布日期 2008.01.03
申请号 US20070852663 申请日期 2007.09.10
申请人 FUJITSU LIMITED 发明人 INOUE TADAO;YAMAMOTO KATSUYOSHI;OHKAWA NARUMI
分类号 H01L31/113;H01L31/062;H04N5/3745 主分类号 H01L31/113
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