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发明名称
Verfahren zur Herstellung einer Speicherzelle
摘要
申请公布号
DE10205079(B4)
申请公布日期
2008.01.03
申请号
DE20021005079
申请日期
2002.02.07
申请人
INFINEON TECHNOLOGIES AG;INFINEON TECHNOLOGIES FLASH GMBH & CO. KG
发明人
POLEI, VERONIKA;WILLER, JOSEF
分类号
H01L21/8247;H01L21/28;H01L21/8246;H01L27/115;H01L29/792
主分类号
H01L21/8247
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