发明名称 |
Support structure for free-standing MEMS device and methods for forming the same |
摘要 |
A microelectromechanical (MEMS) device includes a functional layer including a first material and a deformable layer including a second material. The second material is different from the first material. The deformable layer is mechanically coupled to the functional layer at a junction. The functional layer and the deformable layer have substantially equal internal stresses at the junction.
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申请公布号 |
US2008003710(A1) |
申请公布日期 |
2008.01.03 |
申请号 |
US20060476998 |
申请日期 |
2006.06.28 |
申请人 |
KOGUT LIOR;TUNG MING-HAU;ARBUCKLE BRIAN |
发明人 |
KOGUT LIOR;TUNG MING-HAU;ARBUCKLE BRIAN |
分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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