NARROW HOOK OF ORIENTAL CHAMBER

摘要

A narrow hook of an alignment chamber is provided to reduce or minimize helium leak errors by improving a change of a position of a wafer. A narrow hook(100) is coupled with an inside of an alignment chamber for aligning a wafer(W) to support the wafer from a lower part of the wafer. A sliding prevention part(110) is arranged at a wafer attaching part of the narrow hook not to change a position of the wafer in a lifting process of the narrow hook. A first and second supporting parts(101,102) have the same shapes and are arranged opposite to each other. A horizontal part(103) is extended from the first and second supporting parts. The wafer is loaded on an upper surface of the horizontal part. A slope part is formed to connect the first and second supporting parts with the horizontal part. An inner part of the slope is bent along a shape of the wafer.