IMPROVED DETECTOR FOR CHARGED PARTICLE BEAM INSTRUMENT

摘要

A charged particle beam apparatus (200) comprise a sample holder (232) in a sample chamber (204) for receiving a sample (230), a pressure limiting aperture (214), a magnetic lens (208) for focusing a charged particle beam (222), an electrode (220) for providing electric field in a detection space to oscillate and extend the path of the secondary electrons above the pressure limiting aperture (214) to improve rhe detection efficiency