发明名称 |
Cleaning apparatus and cleaning method |
摘要 |
A cleaning apparatus in which cleaning and drying can be carried out without the risk of reverse contamination of the cleaned object after the drying process. The cleaning apparatus includes a supporting device for supporting an object to be cleaned, and a cleaning cup surrounding the supporting device to prevent splashing of a cleaning liquid. The cleaning apparatus includes a cleaning device for cleaning an inner wall of the cleaning cup with a cleaning liquid.
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申请公布号 |
US2008000509(A1) |
申请公布日期 |
2008.01.03 |
申请号 |
US20070882565 |
申请日期 |
2007.08.02 |
申请人 |
YONEKURA RYOSUKE;NISHIOKA YUKIKO;MIYASHITA MITSUO;ARIGA YOSHIKAZU |
发明人 |
YONEKURA RYOSUKE;NISHIOKA YUKIKO;MIYASHITA MITSUO;ARIGA YOSHIKAZU |
分类号 |
B08B9/00;G02F1/13;B08B3/02;B08B3/08;C03C23/00;G02F1/1333;H01L21/00;H01L21/304 |
主分类号 |
B08B9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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