发明名称 |
FLIP CHIP HAVING BUMP STRUCTURE AND METHOD OF MANUFACTURING THE SAME |
摘要 |
A flip chip having a bump structure and a method for manufacturing the same are provided to attach a bump on a substrate without collapsing or changing the bump in a package assembling process. A conductive pad(120) is formed on a predetermined part of a semiconductor substrate. A barrier layer(130) is formed on a surface of the conductive pad. A bump structure(150) is formed on an upper part and a sidewall of the conductive pad. A protrusive part is formed at each of lower edges of the bump structure. The protrusive part corresponds to 1/10 to 1/100 of the total width of the bump structure. The bump structure includes a preliminary bump formed on a surface of the barrier layer and a main bump formed on the preliminary bump. The preliminary bump is extended to the outside in comparison with the main bump. |
申请公布号 |
KR100790993(B1) |
申请公布日期 |
2008.01.03 |
申请号 |
KR20060062402 |
申请日期 |
2006.07.04 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
IN, CHI HYUN |
分类号 |
H01L21/60 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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