发明名称 FLIP CHIP HAVING BUMP STRUCTURE AND METHOD OF MANUFACTURING THE SAME
摘要 A flip chip having a bump structure and a method for manufacturing the same are provided to attach a bump on a substrate without collapsing or changing the bump in a package assembling process. A conductive pad(120) is formed on a predetermined part of a semiconductor substrate. A barrier layer(130) is formed on a surface of the conductive pad. A bump structure(150) is formed on an upper part and a sidewall of the conductive pad. A protrusive part is formed at each of lower edges of the bump structure. The protrusive part corresponds to 1/10 to 1/100 of the total width of the bump structure. The bump structure includes a preliminary bump formed on a surface of the barrier layer and a main bump formed on the preliminary bump. The preliminary bump is extended to the outside in comparison with the main bump.
申请公布号 KR100790993(B1) 申请公布日期 2008.01.03
申请号 KR20060062402 申请日期 2006.07.04
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 IN, CHI HYUN
分类号 H01L21/60 主分类号 H01L21/60
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