| 摘要 |
A chamber apparatus is provided to increase productivity and to reduce a manufacturing cost by preventing a process error due to foreign materials or particles in a metal contact process. A chamber apparatus includes a first housing part(110), a second housing part(130), and a sealing member(200). The first housing part and the second housing part are formed to set an internal space(105) for performing a predetermined process. The sealing member is formed on opposite surfaces of the first housing part and the second housing part in order to form a vacuum sealing state. A gap between the opposite surfaces of the first housing part and the second housing part is increased from an introduction part of the sealing member toward the internal space.
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