| 摘要 |
An arm type robot for transporting a substrate is provided to reinforce tension of a chain installed to an arm by employing a tension control unit including a tension control bar with a sprocket and a control member. An arm type robot for transporting a substrate includes two arms. Each arm comprises an arm frame(102), driving and driven gears(122,124), a chain(126), a tension control bar(132), and a control unit(142). The arm frame has upper and lower surfaces(104,106) and lateral surfaces, and defines the inner space. The driving and driven gears are separated from each other in the inner space and fixed to first and second link shafts(112,114) attached to two ends of the arm frame. The chain connects the driving gear with the driven gear in the inner space. One end of the tension control bar is rotatably attached to the inner space and a chain sprocket(134) is attached to the other end of the tension control bar and engaged with the chain between the driving gear and the driven gear. The control unit pushes the chain sprocket toward the chain to increase tension of the chain. The control member includes a bolt(144) and a spring(146).
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