发明名称 Thermal flow sensor for high flow velocities
摘要 <p>A flow sensor comprises a heater (4) and two temperature sensors (6a, 6b) arranged symmetrically thereto, all of which are covered by an insulating layer (10). Several metal layers (11) are arranged over the insulating layer (11) and extend at least between the heater and the temperature sensors (6a, 6b). This arrangement increases the measuring range of the sensor to higher flows, in particular when the flow sensor is used to measure the flow of a liquid.</p>
申请公布号 EP1873499(A1) 申请公布日期 2008.01.02
申请号 EP20060013538 申请日期 2006.06.30
申请人 SENSIRION AG 发明人 VON WALDKIRCH, MARC
分类号 G01F1/692;G01F1/684;G01F1/688;G01P5/10 主分类号 G01F1/692
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