PHOTO RESIST PRECIPITATION PREVENTION SYSTEM AND METHOD THEREOF

摘要

A photoresist precipitation prevention system and a precipitation prevention method of the same are provided to disperse photoresist residues by supplying air and a thinner into an inside of a drain box. A regulator(1) adjusts an air supplying and displays differential pressure of gases. A chemical I/O board(2) adjusts a photoresist distribution driving solenoid valve. An air valve(4) is formed to control the air supplying. An air solenoid valve(3) controls the air valve according to according to chemical I/O signals. A thinner tank(7) is used for storing a thinner. An N2 valve(6) controls a supplying of N2 gases. A thinner solenoid valve(5) is formed to control the N2 valve. A filter(8) is formed to remove bubbles through the flow of the thinner and to filter the thinner. A thinner valve(9) is formed to control the flow of the thinner tank into a machine. A check valve(10) is formed. A first drain box is formed to receive the photoresist.