CARRIER HAVING CLEANING FUNCTION

摘要

A carrier with a cleaning function is provided to reduce a manufacturing cost by coating an inner surface of a wafer carrier using a vinyl film and removing the vinyl film after a semiconductor manufacturing process. A carrier with a cleaning function includes a carrier body(10), plural slots(12), a front door(22), and coating films(18,24). The carrier body includes an opening portion. A semiconductor wafer is contained in the carrier body, such that the carrier body moves the semiconductor wafer. The slots are formed inside the carrier body. Semiconductor wafers are mounted in parallel to each other in the respective slots. The front door is attached to the opening of the carrier body and encloses or opens the carrier body. The coating films are coated on an inner surface of the carrier body and a rear surface of the front door.