| 摘要 |
A method for manufacturing a shadow mask, a deposition apparatus having the shadow mask, and a method for manufacturing an OLED using the deposition apparatus are provided to minimize a shadowing region of a light emitting layer by adjusting the location and distance of a deposition source. A method for manufacturing a shadow mask includes the steps of: patterning photoresist(204) on a metal plate(202) in an over-hang structure; and forming a mask pattern on the metal plate by an electroforming method. In the first step, the photoresist is formed with the thickness over 5 mum. The over-hang structure has a slope of 30~60 degrees. The second step includes the step of: removing the photoresist; and performing ashing for removing the particles of the photoresist.
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