Method to cooling electrode of cleaning device for large area substrate,申请号KR20050073542-传众专利搜索

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发明名称	Method to cooling electrode of cleaning device for large area substrate
摘要
申请公布号	KR100773725(B1)	申请公布日期	2008.01.02
申请号	KR20050073542	申请日期	2005.08.11
申请人		发明人
分类号	H05H1/28	主分类号	H05H1/28
代理机构		代理人
主权项
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