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发明名称
Probe for measuring electrical characteristics and method of manufacturing the same
摘要
申请公布号
EP1536241(B1)
申请公布日期
2008.01.02
申请号
EP20040257052
申请日期
2004.11.12
申请人
SHINKO ELECTRIC INDUSTRIES CO., LTD.
发明人
KOIZUMI, NAOYUKI;SHIRAISHI, AKINORI;MURAYAMA, KEI
分类号
G01R1/073;G01R1/067;G01R3/00;H01L21/66
主分类号
G01R1/073
代理机构
代理人
主权项
地址
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