| 摘要 |
A coating apparatus is provided to form a pad on an upper surface of a lift pin to prevent external particles remaining below a stage from flowing over a stage due to up and down operation of the lift pin. A stage(100) holds a substrate(400) through vacuum-adsorption. A plurality of holes(110) are formed at a uniform interval in the stage, wherein an upper surface of each hole is obliquely cut. A lift pin(200) penetrates each of the holes, wherein the lift pin loads the substrate while the lift pin is moved upwardly and downwardly. The lift pin has a pad portion(250) contacted with the hole. A nozzle part(500) jets a coating material on the substrate held on the stage. |
