发明名称 Laser interferometer for repeatable mounting on the wall of a vacuum chamber
摘要 A laser interferometer is disclosed comprising a housing capable of being substantially repeatably mounted to a wall of an environmental chamber, the housing including a laser source, a reflector attached to an object located within the environmental chamber, and a light passage provided through the wall of the environmental chamber enabling passage of a laser beam from the laser source to the reflector. At least one beam steerer may be provided for adjusting direction of passage of a laser beam through the light passage. Also disclosed is a column laser interferometer.
申请公布号 US7315380(B2) 申请公布日期 2008.01.01
申请号 US20050089007 申请日期 2005.03.24
申请人 RENISHAW, PLC 发明人 CHAPMAN MARK ADRIAN VINCENT;LEE WILLIAM ERNEST;MAY MARTIN JONATHAN
分类号 G01B9/02;G03F7/20 主分类号 G01B9/02
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