| 摘要 |
A method for 3 dimensional scanning using a light source for projecting a source of illumination configured to be non-uniform or having a predetermined pattern is disclosed. A CMOS sensor having randomly accessible rows of pixels, and an associated lens system, is mounted above a workpiece, with the workpiece and sensor movable with respect to each other in a scanning relation. Rows of pixels of the sensor are selected for registering reflected light, with data from the selected rows provided to a computer for calculating height information of features of the workpiece. Significantly, both 2 dimensional and 3 dimensional images may be generated during a single scanning pass because of the non-uniform source of light and random access capabilities of the sensor.
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