| 发明名称 |
ALUMINUM NITRIDE BODY HAVING GRADED METALLURGY |
| 摘要 |
<p>DISCLOSED IS AN ALUMINUM NITRIDE BODY HAVING GRADED ETALLURGY AND A METHOD FOR MAKING SUCH A BODY. THE ALUMINUM NITRIDE ODY HAS AT LEAST ONE VIA AND INCLUDES A FIRST LAYER IN DIRECT ONTACT WITH THE ALUMINUM NITRIDE BODY AND A SECOND LAYER IN DIRECT NTACT WITH, AND THAT COMPLETELY ENCAPSULATES, THE FIRST LAYER. THE FIRST LAYER INCLUDES 30 TO 60 VOLUME PERCENT ALUMINUM ITRIDE AND 40 TO 70 VOLUME PERCENT TUNGSTEN AND/OR MOLYBDENUM WHILE THE SECOND LAYER INCLUDES 90 TO 100 VOLUME PERCENT OF TUNGSTEN AND/OR MOLYBDENUM 0 TO 10 VOLUME PERCENT OF ALUMINUM NITRIDE. (FIG. 1)</p> |
| 申请公布号 |
MY134821(A) |
申请公布日期 |
2007.12.31 |
| 申请号 |
MY1995PI03713 |
申请日期 |
1995.12.01 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION;CARBORUNDUM COMPANY |
发明人 |
JON ALFRED CASEY;ANDREW MICHAEL REITTER;SUBHASH LAXMAN SHINDE;RAO VENKATESWARA VALLABHANENI;ROBERT A YOUNGMAN;CARLA NATALIA CORDERO;BENJAMIN VITO FASANO;DAVID BRIAN GOLAND;ROBERT HANNON;JONATHAN H HARRIS;LESTER WYNN HERRON;GREGORY MARVIN JOHNSON;NIRANJAN MOHANLAL PATEL |
| 分类号 |
B22F3/00;B32B18/00;B22F7/02;C04B35/581;C04B37/02;C04B41/51;C04B41/52;C04B41/88;C04B41/89;C22C29/16;H01L21/48;H01L23/373;H05K1/03;H05K3/24;H05K3/40;H05K3/46 |
主分类号 |
B22F3/00 |
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