APPARATUS AND METHOD FOR REDUCING SUBSTRATE WARPAGE

摘要

THE INVENTION PROVIDES AN APPARATUS AND METHOD FOR REDUCING WARPAGE OF A SUBSTRATE (10) UNDERGOING A MOLDING PROCESS, COMPRISING A CONVEYING DEVICE FOR TRANSPORTING THE SUBSTRATE (10) DURING MOLDING AND PRESSURE MEANS ADAPTED TO ACT ON THE SUBSTRATE WHEREBY TO MAINTAIN THE FLATNESS OF THE SUBSTRATE. USING THE INVENTION, IT IS POSSIBLE TO PROVIDE AN APPARATUS AND METHOD WHICH ARE USABLE WITH CONVENTIONAL SUBSTRATES AND WHICH REDUCE RELIANCE ON MATERIAL FORMULATION TO MAINTAIN FLATNESS OF THE SUBSTRATE (10). (FIG 1C)