Spin Cleaning Equipment,申请号KR20010082655-传众专利搜索

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发明名称	Spin Cleaning Equipment
摘要
申请公布号	KR100790600(B1)	申请公布日期	2007.12.31
申请号	KR20010082655	申请日期	2001.12.21
申请人		发明人
分类号	B08B3/02;H01L21/304;B05C11/08;B05C11/10;F26B5/08;F26B9/06;H01L21/00	主分类号	B08B3/02
代理机构		代理人
主权项
地址

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