发明名称 |
ABRASIVE MACHINE AND METHOD OF ABRADING WORK PIECE |
摘要 |
THE ABRASIVE MACHINE IS CAPABLE OF FEEDING A PROPER AMOUNT OF SLURRY AND PREVENTING A WORK PIECE (20) FROM STICKING ON AN UPPER ABRASIVE PLATE (10). THE ABRASIVE MACHINE COMPRISES: THE UPPER ABRASIVE PLATE (10) ABRADING AN UPPER FACE OF THE WORK PIECE (20) AND HAVING A PLURALITY OF SLURRY HOLES (48) FOR FEEDING THE SLURRY TO THE WORK PIECE (20); A LOWER ABRASIVE PLATE (12) ABRADING A LOWER FACE OF THE WORK PIECE (20); A SLURRY FEEDING UNIT (60) PRESSURIZING AND FEEDING THE SLURRY; A PLURALITY OF SLURRY PATHS (112) RESPECTIVELY CONNECTING THE SLURRY HOLES (48) TO THE SLURRY FEEDING UNIT (60); A PLURALITY OF VALVE MECHANISMS (70) RESPECTIVELY PROVIDED TO THE SLURRY PATHS (112) SO AS TO CONTROL FLOWS OF THE SLURRY; AND A CONTROL SECTION (71) FOR CONTROLLING THE VALVE MECHANISMS (70).(FIG 1) |
申请公布号 |
MY134629(A) |
申请公布日期 |
2007.12.31 |
申请号 |
MY2003PI04051 |
申请日期 |
2003.10.23 |
申请人 |
FUJIKOSHI MACHINERY CORP. |
发明人 |
NORIHIKO MORIYA |
分类号 |
B24B37/04;B24B57/02;B24B37/00;H01L21/304 |
主分类号 |
B24B37/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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