发明名称 ABRASIVE MACHINE AND METHOD OF ABRADING WORK PIECE
摘要 THE ABRASIVE MACHINE IS CAPABLE OF FEEDING A PROPER AMOUNT OF SLURRY AND PREVENTING A WORK PIECE (20) FROM STICKING ON AN UPPER ABRASIVE PLATE (10). THE ABRASIVE MACHINE COMPRISES: THE UPPER ABRASIVE PLATE (10) ABRADING AN UPPER FACE OF THE WORK PIECE (20) AND HAVING A PLURALITY OF SLURRY HOLES (48) FOR FEEDING THE SLURRY TO THE WORK PIECE (20); A LOWER ABRASIVE PLATE (12) ABRADING A LOWER FACE OF THE WORK PIECE (20); A SLURRY FEEDING UNIT (60) PRESSURIZING AND FEEDING THE SLURRY; A PLURALITY OF SLURRY PATHS (112) RESPECTIVELY CONNECTING THE SLURRY HOLES (48) TO THE SLURRY FEEDING UNIT (60); A PLURALITY OF VALVE MECHANISMS (70) RESPECTIVELY PROVIDED TO THE SLURRY PATHS (112) SO AS TO CONTROL FLOWS OF THE SLURRY; AND A CONTROL SECTION (71) FOR CONTROLLING THE VALVE MECHANISMS (70).(FIG 1)
申请公布号 MY134629(A) 申请公布日期 2007.12.31
申请号 MY2003PI04051 申请日期 2003.10.23
申请人 FUJIKOSHI MACHINERY CORP. 发明人 NORIHIKO MORIYA
分类号 B24B37/04;B24B57/02;B24B37/00;H01L21/304 主分类号 B24B37/04
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