ALIGNMENT OF PRINTED CIRCUIT BOARD TARGETS

摘要

A beam alignment apparatus for printed circuit board targets is provided to enhance a laser machining accuracy by decreasing element sizes on a PCB(Printed Circuit Board). A radiation source(50) provides an illumination with an illumination wavelength to an object site and generates a returning radiation from the site. An image sensor(56) receives the returning radiation from an element of an optical system and form an image of the site. A beam source(22) generates a beam of a micromachining radiation having a micromachining wavelength which is different from the illumination wavelength. A processor(32) calculates a real position of the site and outputs a signal representing the real position. The processor arranges the beam source to form the beam which is aligned with respect to the calculated position. The processor drives the beam source at the calculated position and performs a micromachining process at the calculated position.