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发明名称
EQUIPMENT OF PLASMA PROCESS
摘要
申请公布号
KR100790649(B1)
申请公布日期
2007.12.31
申请号
KR20030054511
申请日期
2003.08.07
申请人
发明人
分类号
C23C16/00;H05H1/46;B01J19/08;C23C16/44;C23C16/455;C23C16/50;C23C16/507;H01J37/32;H01L21/205
主分类号
C23C16/00
代理机构
代理人
主权项
地址
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