发明名称 MODULATION OF STRESS IN ESL SIN FILM THROUGH UV CURING TO ENHANCE BOTH PMOS AND NMOS TRANSISTOR PERFORMANCE
摘要 An example embodiment of a method of forming a semiconductor device comprising the following. We form at least a first transistor over a first region of a substrate and forming at least a second transistor over a second region of the substrate. We form a stress layer over the first and second transistors. We form an electromagnetic radiation blocking layer over the second transistor and not over the first transistor. In an exposure step, we expose the electromagnetic radiation blocking layer over the second transistor and exposing the stress layer over the first transistor to electromagnetic radiation to form a cured stress layer over the first transistor. The cured stress layer has a different stress than the stress layer. We may remove the electromagnetic radiation blocking layer.
申请公布号 SG137839(A1) 申请公布日期 2007.12.28
申请号 SG20070065873 申请日期 2007.09.17
申请人 CHARTERED SEMICONDUCTOR MANUFACTURING LTD. 发明人 WIDODO JOHNNY;LIU HUANG
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