| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method and the like of a semiconductor integrated circuit capable of inspecting fundamental waves, higher harmonics and spurious power without using an expensive device. SOLUTION: This inspection device includes first to third blocks A, B and C. The first block A is used for measuring power of fundamental waves of an output signal of a semiconductor integrated circuit 1, and comprises a band-pass filter 41, an A.C.-D.C. conversion circuit 61 and a voltmeter 71. The second block B is used for measuring power of predetermined higher harmonics of the output signal of the semiconductor integrated circuit 1, and comprises a band rejection filter 42, an A.C.-D.C. conversion circuit 62 and a voltmeter 72. The third block C is used for measuring spurious power included in the output signal of the semiconductor integrated circuit 1, and comprises a band rejection filter 43, a band-pass filter 81, an A.C.-D.C. conversion circuit 63 and a voltmeter 73. COPYRIGHT: (C)2008,JPO&INPIT
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