| 摘要 |
PROBLEM TO BE SOLVED: To provide a single crystal pulling apparatus in which pulling of a single crystal can be suitably restarted even in the case that upward stress acts on an inner crucible when the single crystal is manufactured by a Czochralski method. SOLUTION: The single crystal pulling apparatus has a double-structured crucible and is equipped with: a supporting mechanism which supports an inner crucible 5 at a prescribed position in the up-and-down direction in the apparatus in such a manner that the inner crucible 5 can be displaced in upward direction when upward stress acts on the inner crucible 5, and the inner crucible 5 can return to the prescribed position in the up-and-down direction by the own gravity when no stress acts on the inner crucible 5; and a guide mechanism which supports the inner crucible 5 in such a manner that, after the crucible 5 is displaced by the upward stress, when no stress acts on the inner crucible 5 and the inner crucible 5 returns to the prescribed position in the up-and-down direction, the inner crucible 5 can return on the same peripheral circle of a prescribed position in a horizontal direction. COPYRIGHT: (C)2008,JPO&INPIT
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