发明名称 |
VERBUNDMIKRORESONATOR MIT HOHER DEFORMATION |
摘要 |
An electromechanical resonator including a vibrating body, at least one excitation electrode, and at least one detection electrode. The vibrating body includes a first part made of a first material with a first Young's modulus and a second part made of a second material with a second Young's modulus, less than the first Young's modulus, the second part being at least partially located facing the detection electrode. |
申请公布号 |
DE602005003372(D1) |
申请公布日期 |
2007.12.27 |
申请号 |
DE20056003372T |
申请日期 |
2005.06.29 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE |
发明人 |
TRIPARD, AMYOT;BRECHET, YVES |
分类号 |
H03H9/46;B81B3/00;H03H3/007 |
主分类号 |
H03H9/46 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|