УСТРОЙСТВО ОПРЕДЕЛЕНИЯ ЭЛЛИПСОМЕТРИЧЕСКИХ ПАРАМЕТРОВ ОБЪЕКТА В РЕАЛЬНОМ ВРЕМЕНИ,申请号RU20060121233-传众专利搜索

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发明名称	УСТРОЙСТВО ОПРЕДЕЛЕНИЯ ЭЛЛИПСОМЕТРИЧЕСКИХ ПАРАМЕТРОВ ОБЪЕКТА В РЕАЛЬНОМ ВРЕМЕНИ
摘要
申请公布号	RU2006121233(A)	申请公布日期	2007.12.27
申请号	RU20060121233	申请日期	2006.06.16
申请人	ООО "Интеллектуальные спектральные технологии" (RU)	发明人	Вагин Василий Алексеевич (RU);Кирь нов Анатолий Павлович (RU)
分类号	G01N21/21	主分类号	G01N21/21
代理机构		代理人
主权项
地址

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