| 摘要 |
Vacuum coating equipment having transport rollers for a planar substrate is provided to easily set a transport speed of the substrate by installing a driving member, which transfers a rotation movement to the transport roller through a magnet gap coupling. Vacuum coating equipment comprises a vacuum coating chamber(2) and a plurality of rotary transport rollers(6,7,8,9). The transport rollers are disposed in parallel to each other in the vacuum coating chamber to transport a planar substrate(11). Driving members(10,30,31,32,33) are disposed outside the vacuum coating chamber. At least one magnet coupling is disposed between the driving member and one of the transport rollers.
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