| 摘要 |
A multi-step diaphragm pump is provided to obtain a high safety factor, anti-fatigue characteristics for a long time, and durability against high pressure, wherein normal operation of the pump is not influenced by damage of each of the diaphragms. A multi-step diaphragm pump includes a driving shaft(15) mounted with a plurality of dish type diaphragms(4) connected to each other continuously, and pistons(6) fixed to front parts of the dish type diaphragms. A hydraulic medium is filled between adjacent diaphragms. One of the pistons at the forefront position contacts liquid in a working chamber. Sealing rings(6) are mounted between the pistons and the working chamber.
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