| 摘要 |
PROBLEM TO BE SOLVED: To provide a washing roller which performs washing effectively by preventing a contaminated washing liquid from staying on a substrate. SOLUTION: The washing roller has a roller main body 10, and brush bristles 15 are implanted on the outer peripheral surface to the roller main body. The roller main body has an internal space constituting a channel of the washing liquid, and the internal space is connected with a washing liquid supply pipe 14 through a coupling 12b. At the roller main body 10, two or more nozzles 16 communicated with the internal space and jetting the washing liquid are formed spirally along the axis of the roller main body. COPYRIGHT: (C)2008,JPO&INPIT
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