| 摘要 |
PROBLEM TO BE SOLVED: To reduce the number of trial times and a burden of an inspector for obtaining a psychological measurement curve by using a simple constitution, in order to able to determine an inspection standard with high effect, accuracy and simply at low cost, and in order to make a visual inspection automated by using the inspection standard, in an inspection standard determining method, an inspection standard determining apparatus and a visual inspecting apparatus. SOLUTION: The inspection standard determining apparatus 1 determines the inspection standard which is used for determining as to whether a defect candidate area of a sample is a defect, by using the appearance feature quantity of the defect candidate area, based on the psychological measurement curve obtained, by digitizing the response of the inspector M to a stimulation consisting of the feature quantity. The psychological measurement curve is obtained by using a staircase method. The inspection standard determining apparatus 1 comprises an image forming means 2, an image presenting means 3; an input means 4, a presentation image determining means 5, a statistical processing means 6, a memory means 7, an external input/output means 8, and a central control means 10. By using the psychological measurement curve, human sensibilities, i.e., perceptive and sensory characteristics can be added to the inspection standards. COPYRIGHT: (C)2008,JPO&INPIT
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