发明名称 Capacitor and Method of Manufacturing a Capacitor
摘要 In a method of fabricating a semiconductor device, a level of metal is formed within an interval dielectric. The level of metal includes a first metal line separated from a second metal line by a region of the interlevel dielectric. The region of interlevel dielectric is removed between the first metal line and the second metal line. A high-k dielectric is formed between the first metal line and the second metal line in the region where the interlevel dielectric was removed such that a capacitor is formed by the first metal line, the second metal line and the high-k dielectric.
申请公布号 US2007294871(A1) 申请公布日期 2007.12.27
申请号 US20070851969 申请日期 2007.09.07
申请人 FELSNER PETRA;SCHAFBAUER THOMAS;KERST UWE;BARTH HANS-JOACHIM;KALTALIOGLU ERDEM 发明人 FELSNER PETRA;SCHAFBAUER THOMAS;KERST UWE;BARTH HANS-JOACHIM;KALTALIOGLU ERDEM
分类号 H01G9/004;H01G4/06;H01G4/228;H01G4/33;H01G4/40;H01L21/768;H01L21/77;H01L21/8242;H01L27/02;H01L27/108 主分类号 H01G9/004
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