Verfahren zum Herstellen einer mehrschichtigen elektrostatischen Linsenanordnung, insbesondere einer Phasenplatte und derartige Phasenplatte

摘要

The invention relates to a method for the production of a multilayer electrostatic lens arrangement with at least one lens electrode in general, a method for the production of a phase plate in particular as well as the lens arrangement, the phase plate and a transmission electron microscope with the phase plate. The lens arrangement or the phase plate is produced from a thin self-supporting silicon nitride membrane which is fixed in a macroscopic chip with deposition of further layers. The central bore as well as the aperture opening are milled out by means of an ion beam.