| 摘要 |
[PROBLEMS] To provide a sintered yttria (Y2O3) of high density excelling in plasma resistance. [MEANS FOR SOLVING PROBLEMS] There is provided a sintered yttria (Y2O3) comprising yttria (Y2O3) crystals and Y3 BO6 crystals as constituent crystals thereof. This sintered yttria (Y2O3) is obtained by adding 0.02 to less than 10 wt.%, in terms of boron oxide (B2O3), of boron compound to yttria (Y2O3) powder, molding the mixed powder, and sintering the same at 1300°C to below 1600°C.
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