| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric body thin film element which has an excellent piezoelectric performance and has high reliability without the decline of insulation even when driven by a high voltage under a highly humid environment, an ink-jet head using the piezoelectric body thin film element, and an ink-jet recorder provided with the ink-jet head as a printing means. <P>SOLUTION: A piezoelectric body layer 14 is turned to the laminate structure of a layer 14a(1-3) of a larger Pb composition amount compared to a stoichiometric composition, and a layer 14b (1, 2) of a smaller Pb composition amount compared to the stoichimetric composition. Even when a leakage path is generated in the layer 14a of the larger Pb composition amount by a lead dioxide generated by electrochemical reaction under the highly humid environment, since the leakage path is not generated in the layer 14b of the smaller Pb composition amount, the decline is prevented in the insulation between upper and lower electrodes. Also, compared to the single layer film of only the layer 14b of the smaller Pb composition amount, since the layer 14a of the larger Pb composition amount is included, the decline of a manufacture margin is prevented as well and an excellent piezoelectric performance is achieved. <P>COPYRIGHT: (C)2008,JPO&INPIT |
