| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of forming a dielectric film which can be homogeneously crystallized, a method of manufacturing a piezoelectric element, and a method of manufacturing a liquid jetting head. <P>SOLUTION: A baking process comprises a first baking step of baking after forming at least one layer of a defatted dielectric precursor film 71 by a dielectric precursor film forming step over the entire surface a substrate 110 including its peripheral portion in its one plane, and a second backing step of baking after forming the defatted dielectric precursor film 71 by the dielectric precursor film forming step on other regions than the peripheral portion of the substrate 110 in its one plane. <P>COPYRIGHT: (C)2008,JPO&INPIT |
