| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a pressure sensor capable of preventing deterioration of sensor sensitivity, and of providing the pressure sensor at low cost; and a pressure sensor. <P>SOLUTION: This pressure sensor 10 has a structure provided with: a SAW element piece having an IDT 16 formed on a principal surface of a piezoelectric substrate 14; a first fixation substrate 40 jointed to the principal surface 14a of the piezoelectric substrate 14, provided with a recessed part 42 at a part facing to the IDT 16, and having a coefficient of thermal expansion different from that of the piezoelectric substrate 14; and a second fixation substrate 50 jointed to the back surface 14b of the piezoelectric substrate 14, having a coefficient of thermal expansion different from that of the piezoelectric substrate 14, and provided with a press-in opening 54. <P>COPYRIGHT: (C)2008,JPO&INPIT |
