| 摘要 |
PROBLEM TO BE SOLVED: To cool substrates to be joined without contamination thereof, and to protect adequately the substrates to be joined staying in an apparatus of the upstream side when a trouble occurs in an apparatus of the downstream side. SOLUTION: A substrate cooler 30 is provided in the downstream side of a joining part 29 to form a joined substrate 20 by joining a glass substrate 3 and a photosensitive web 7. The substrate cooler 30 is provided with a joined substrate stocker 68 including a plurality substrate storages 76 for storing the joined substrates 20; and a robot 69 for carrying-in and -out of the joined substrates by storing the non-cooled joined substrates 20 carried in from the joining part 29 to the joined substrate stocker 68, taking the cooled joined substrates 20 out of the joined substrate stocker 68, and carrying the substrate to a base peeling part 31. The plurality of substrate storages 76 is divided into an ordinary storing area used for the ordinary operation and a buffer area not used for the ordinary operation. If a trouble occurs in the base peeling part 31, the substrates staying in a substrate heating part 28 and the joining part 29 are stored in the buffer area. COPYRIGHT: (C)2008,JPO&INPIT
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