| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam generating device which carries out non-spherical aberration, achromatization and energy monochromatization by using only a lens with a rotationally-symmetrical structure. SOLUTION: An ionic line which has various energy values come out of 19 enters into 10 and then into 3. Only ionic lines which passed through a central hole of 18 of ionic lines come out of 3 enter into 4 to be converged at 4, thereby irradiating 2. Non-spherical aberration is carried out by adjusting an excitation voltage of 3. Achromatization or energy monochromatization is carried out by adjusting an excitation voltage of 10. A solution is (1) projecting an image of 19 on 2 by using two or more lenses, (2) exciting lenses in a way that at least three beam crossovers including 19 and 2 are produced between 19 and 2, and (3) placing at least one of crossovers within zones of action of lenses. The excitation intensity of each lens is decided by carrying out an orbital calculation of a charged particle beam. COPYRIGHT: (C)2008,JPO&INPIT
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