MANUFACTURING DEVICE OF LIGHT-EMITTING ELEMENT, AND MANUFACTURING METHOD OF LIGHT-EMITTING ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing device of a light-emitting element of which the structure is simple and occupying area is small. SOLUTION: The manufacturing device of the light-emitting element has a plurality of treatment chambers in order to form light-emitting elements having a plurality of layers including organic layers on treating substrates and the treating substrates are sequentially conveyed to the plurality of the treatment chambers. When the plurality of the treatment chambers are substantially linearly connected and the treating substrates are conveyed between neighboring two treatment chambers, the two treatment chambers are constituted so as to be filled with a gas having no reactivity with the layers on the treating substrates. COPYRIGHT: (C)2008,JPO&INPIT