发明名称 LIGHT-EMITTING ELEMENT AND MANUFACTURING METHOD OF LIGHT-EMITTING ELEMENT
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing device of a light-emitting element in which the light-emitting element having a plurality of layers including organic layers can be manufactured with superior productivity, and provide a manufacturing method of the light-emitting element in which the light-emitting element having the plurality of the layers including the organic layers can be manufactured with excellent productivity. SOLUTION: This manufacturing device of the light-emitting element has a plurality of treatment chambers where substrate treatments are carried out in order to form light-emitting elements having the plurality of the layers including the organic layers on substrates to be treated. The plurality of the treatment chambers are respectively constituted so that the substrate treatments of the substrates to be treated is carried out such that element forming faces of the substrates to be treated on which the light-emitting elements are formed are made to face in the gravity direction. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007335203(A) 申请公布日期 2007.12.27
申请号 JP20060164965 申请日期 2006.06.14
申请人 TOKYO ELECTRON LTD;TOYOTA INDUSTRIES CORP;TOHOKU UNIV 发明人 YAGI YASUSHI;WATANABE SHINGO;NOZAWA TOSHIHISA;KAWAMURA CHUICHI;YOSHINO KIMIHIKO;OMI TADAHIRO
分类号 H05B33/10;H01L51/50 主分类号 H05B33/10
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