| 摘要 |
<p>An apparatus for manufacturing a semiconductor device is provided to reduce repair time by using a preliminary transport part installed at the outside of a transport chamber, when a wafer transport error occurring. A process chamber(130) is provided. A transport chamber(110) is connected to the one side of the process chamber. A primary transport part(112) is positioned within the transport chamber and takes in/out a wafer from the process chamber. A secondary transport part(140) is positioned adjacent to the outside of the transport chamber, and transports the wafer which is transported wrong duet to a wrong operation to the process chamber or the primary transport part.</p> |
