VERFAHREN ZUR SYNTHESE EINER VERBINDUNG DER FORMEL M sb n+1 /sb AX sb n /sb, FILM AUS DER VERBINDUNG UND VERWENDUNG DAVON

摘要

A method of synthesizing or growing a compound having the general formula M_n+1AX_n( 16 ) where M is a transition metal, n is 1, 2, 3 or higher, A is an A-group element and X is carbon, nitrogen or both, which comprises the step of exposing a substrate to gaseous components and/or components vaporized from at least one solid source ( 13, 14, 15 ) whereby said components react with each other to produce the M_n+1AX_n ( 16 ) compound.