发明名称 COATER HAVING PRE-SPREADING UNIT AND METHOD OF COATING
摘要 <p>A pre-spreading unit, a substrate coating device having the same, and a substrate coating method are provided to improve uniformity of thickness of a leading end and end of a substrate by discharging continuously without stopping a slit nozzle. A pair of sheet transfer part(130) is located to be faced toward an axis direction. A sheet(310) is formed to be transferred according to the rotation of the sheet transfer part. The sheet is constituted to fill the substrate partially. A stage part(200) is installed to mount a substrate. A pre-spreading unit(300a,300b) is formed at least one side of the stage part. A nozzle part(100) sprays coating liquids on the substrate.</p>
申请公布号 KR100787908(B1) 申请公布日期 2007.12.27
申请号 KR20060071252 申请日期 2006.07.28
申请人 K.C.TECH CO., LTD. 发明人 KWON, OH KYUNG;YOO, YONG KEUN;LEE, DONG SUNG
分类号 H01L21/027 主分类号 H01L21/027
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