| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electron device that has low resistance, suppresses the occurrence of a hillock and a void, and has an electrode with a high orientation property. <P>SOLUTION: The electron device has a lower electrode, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. In this case, at least one of the lower and upper electrodes uses aluminum as a main constituent, and is made of alloy to which at least one is added as selected from a group comprising Ni, Co, V, Ta, Mo, W, Ti, Y, and Nd. <P>COPYRIGHT: (C)2008,JPO&INPIT |
