| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pellicle storage container which has rigidity enhanced by a structure fixed on the backside of a pellicle placing face with fixtures, prevents deformation of adhesive material for a mask by flatness directly imparted to the pellicle placing face, and enables recycling of the structure. <P>SOLUTION: The structure 7 is disposed on the face of a pellicle placing table 3 opposite to the pellicle 2 placing face 3a, and the structure 7 is fixed on the pellicle placing table 3, with screws 8 penetrated through holes 3b made in the pellicle placing table 3. <P>COPYRIGHT: (C)2008,JPO&INPIT |
