| 摘要 |
In a substrate transfer apparatus that pneumatically holds and transfers a substrate having first and second surfaces, a first pneumatic sucker arm has at least two first suction ports for pneumatically sucking the first surface of the substrate, and a second pneumatic sucker arm has at least two second suction ports for pneumatically sucking the second surface of the substrate. First and second drive mechanisms vertically move the first and second pneumatic sucker arms toward the respective first and second surfaces of the substrate, with the at least two first suction ports and the at least two second suction ports being directed to the respective first and surfaces of the substrate. The vertical movement of the first pneumatic sucker arm is stopped when any one of sucking pressures generated in the first suction ports is lowered to a predetermined low pressure, and the vertical movement of the second pneumatic sucker arm is stopped when any one of sucking pressures generated in the second suction ports is lowered to the predetermined low pressure.
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