Herstellungsverfahren für eine Koaxialleiteranordnung

摘要

A tubular conductor trench (GB1') is formed underneath the top side (OF) of a substrate (1). Coaxial conductors are integrally arranged in the tubular conductor trench of the substrate. The coaxial conductors include an outer conductor layer (15), a central insulating layer (20), and an inner conductor layer (25) which are circularly enclosed in the tubular conductor trench. An external insulating layer (10) is formed between the outer conductor layer and the substrate. An independent claim is included for the manufacture process of the integrated coaxial conductor arrangement.